Beijing Qinglian Measurement and Control Technology Co., Ltd

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Beijing Qinglian Measurement and Control Technology Co., Ltd

Tel：18500242456
Email：sales@qingliancekong.com

Address: Inside Beijing Taixing Art Institute, Shuipo Village, Gaoliying Town, Shunyi District, Beijing

Specialty Gas Fluorine Online Analyzer

The specialty gas industry is critical to a wide range of sectors, including oil and gas, petrochemicals, consumer electronics, analytical research, and glove-box applications. The growth of the specialty gas market is largely driven by increasing demand for semiconductor and LED products. High-purity gases play a vital role in the manufacturing processes of consumer electronics. In 2020, the global market was valued at US$10 billion, and it is expected to continue growing.

Suppliers are required to verify gas concentrations as part of quality control before shipping products. The OMA-406 rack-mounted analyzer uses dispersive ultraviolet spectroscopy to measure the concentrations of gas mixtures including fluorine, chlorine, hydrogen sulfide, sulfur dioxide, and ammonia. Its full-spectrum analysis capability allows a single analyzer to be calibrated for multiple ranges and various analytes. Specialty gas manufacturers can leverage the OMA-406’s versatility to simplify their quality-control procedures.

Product Features

Special Applications

Measuring F in excimer laser gas mixtures ₂/Cl₂

Excimer lasers have extensive industrial applications, ranging from patterning microchip circuits and bonding transistor layers to vision correction. These lasers utilize specific combinations of halogen gases, rare inert gases, and buffer gases. Such gas mixtures typically consist of 2–9% inert gas (krypton, argon, or xenon), 0.2% halogen gas (chlorine or fluorine), and 90–98% buffer gas (helium or neon). When these gases are subjected to appropriate electrical stimulation and pressure in specific mixtures, they emit deep ultraviolet (DUV) light at various wavelengths.

Specialty gas companies produce mixed gas cylinders containing mixtures of XeF or KrCl, which are sold to companies that operate excimer lasers. During the production process, excimer laser gas cylinders must be strictly monitored. In addition, the mixed gas cylinders need to be verified and the halogen gases quantified.

The OMA-406 rack-mounted analyzer continuously outputs F. ₂ And Cl ₂ The readings are updated approximately every 5 seconds, providing a new measurement each time. When producing excimer laser gas mixtures, the response time T90 is critical to promptly address sudden changes in product quality.

Fluorine F ₂ And chlorine Cl ₂ Absorption spectrum

F ₂ Absorption spectrum: 1.08% F ₂

Cl ₂ Absorption spectrum: 4890 ppmv Cl ₂

Technical concept

Instrument features

Use a UV-Vis spectrophotometer to continuously measure the concentrations of mixtures containing fluorine, chlorine, hydrogen sulfide, sulfur dioxide, ammonia, or other gases.
All-solid-state design, no moving parts, no consumables, and low maintenance costs.
The additional software platform can support up to 4 chemical analytes.
The safe fiber-optic design ensures that the sample gas never enters the instrument’s interior, making it the safest solution for this type of application.

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